Abstract: Over the past decades, the metal-oxide-based semiconductors have become increasing prominent materials due to their inherent advantages including wide bandgap energy, large exciton binding energy, high radiation hardness, and compatibility with conventional fabrication processes. Although several methods were utilized to deposit various metal-oxide-based materials onto different substrates for fabricating devices, the novel vapor cooling condensation method was successfully demonstrated previously [1][2]. The metal-oxide-based materials and thin films deposited on various substrates at liquid-nitrogen temperatures using the vapor cooling condensation method are studied. The related properties are also demonstrated. Besides, the performances of the associated devices manufactured using those materials and thin films are reported in this work.

Keywords: Metal-oxide materials and devices, Vapor cooling condensation system

References:
[1]. H. Y. Lee, S. D. Xia, W. P. Zhang, L. R. Lou, J. T. Yan, and C. T. Lee, “Mechanisms of high quality i-ZnO thin films deposition at low temperature by vapor cooling condensation technique”, J. Appl. Phys., vol. 108, 073119 (2010).
[2]. T. S. Lin and C. T. Lee, “Performance investigation of p-i-n ZnO-based thin film homojunction ultraviolet photodetectors”, Appl. Phys. Lett., vol. 101, 221118, (2012).

Acknowledgements: This work was supported by the National Science and Technology Council (NSTC), under No. NSTC 113-2221-E-006-106-MY3 and NSTC 114-2221-E-006-200-MY3.

Biography: Ching-Ting Lee received his B.S. and M.S. degrees in the Electrical Engineering Department of the National Cheng Kung University, Taiwan. He received his Ph.D. degree from the Electrical Engineering Department from the Carnegie-Mellon University, Pittsburgh, PA. He joined on Yuan Ze University as the vice president from 2018 to 2022, and now he is the Emeritus Chair Professor in Yuan Ze University and National Cheng Kung University. Among the awards and honors, he has received are Fellow of IEEE, Fellow of IET, Fellow of Asia-Pacific Academy of Materials Academician, (APAM) Academician. He received the ASIA’s Education Excellence Awards from Le Meridien Singapore and International Association of Advanced Materials (IAAM) Fellow from Sweden. His research activities have also investigated GaN-based materials and devices, gas sensor materials and devices, and their associated integration for electrooptical integrated circuits.